Browsing by author "Monchoix, Hervé"
Now showing items 1-5 of 5
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Development of an SBT MOCVD production process for FERAM applications
Everaert, Jean-Luc; Bartic, Andrei; Kaczer, Ben; Wouters, Dirk; Monchoix, Hervé; Mitaut, Christian; Van Autryve, Luc; Pavano, Rita; Casella, Patrizia; Zambrano, R. (2001) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk (2002) -
Spacers alternatives for integration of 3D stacked SBT FeCAPs
Lisoni, Judit; Johnson, J.; Everaert, Jean-Luc; Paraschiv, Vasile; Boullart, Werner; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc (2003) -
SrBi2Ta2O2 Patterning for feram applications: a dry -wet approach
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Wouters, Dirk; Vecchio, Emma; Fragala, Maria-Elena; Van Autryve, Luc; Monchoix, Hervé; Casella, Patrizia; Zambrano, Raffaele (2003)