Development of an SBT MOCVD production process for FERAM applications

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Authors
Everaert, Jean-Luc; Bartic, Andrei; Kaczer, Ben; Wouters, Dirk; Monchoix, Hervé; Mitaut, Christian; Van Autryve, Luc; Pavano, Rita; Casella, Patrizia; Zambrano, R.
Conference
13th International Symposium on Integrated Ferroelectrics - ISIF
Title
Development of an SBT MOCVD production process for FERAM applications
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