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Development of an SBT MOCVD production process for FERAM applications

Date

2001
Meeting abstract
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dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorBartic, Andrei
dc.contributor.authorKaczer, Ben
dc.contributor.authorWouters, Dirk
dc.contributor.authorMonchoix, Hervé
dc.contributor.authorMitaut, Christian
dc.contributor.authorVan Autryve, Luc
dc.contributor.authorPavano, Rita
dc.contributor.authorCasella, Patrizia
dc.contributor.authorZambrano, R.
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2021-10-14T16:54:51Z
dc.date.available2021-10-14T16:54:51Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5283
dc.source.beginpage8.2.1C
dc.source.conference13th International Symposium on Integrated Ferroelectrics - ISIF
dc.source.conferencedate11/03/2001
dc.source.conferencelocationColorado Springs, CO USA
dc.title

Development of an SBT MOCVD production process for FERAM applications

dc.typeMeeting abstract
dspace.entity.typePublication
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