Browsing by author "Uematsu, M."

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Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution

Shimizu, Yasuo; Kawamura, Y.; Uematsu, M.; Itoh, Kohei M.; Tomita, Mitsuhiro; Sasaki, Mikio; Uchida, Hiroshi; Takahashi, Mamoru (2009)
Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon

Koelling, Sebastian; Richard, Olivier; Bender, Hugo; Uematsu, M.; Schulze, Andreas; Zschaetzsch, Gerd; Gilbert, Matthieu; Vandervorst, Wilfried (2013)