Browsing by author "Krasnikov, G."
Now showing items 1-4 of 4
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Adsorption isobars of fluorocarbon compounds for cryogenic plasma etching of low-k dielectrics (in Russian)
Rezvanov, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogil'nikov, K.; Zhang, Liping; de Marneffe, Jean-Francois; Dussarat, C.; Baklanov, Mikhaïl (2015) -
Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials
Rezvanov, A.; Mogilnikov, K.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Zhang, Liping; Dussarrat, C.; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2015) -
Effect of quartz window temperature on plasma composition during STI etch
Danilkin, Evgeny; Shamiryan, Denis; Baklanov, Mikhaïl; Milenin, Alexey; Boullart, Werner; Krasnikov, G.; Gutschin, O; Mochalov, A (2008) -
Investigation of plasma damage of low-k dielectrics during cryogenic etching
Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl (2015)