Browsing by author "Simms, Ihsan"
Now showing items 1-7 of 7
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Development of integrated wet cleans for 3D-SIC technologies
Suhard, Samuel; Simms, Ihsan; Brown, Ian; Shogo, Mizota; Koji, Kagawa; Claes, Martine; Buisson, Thibault; Jourdain, Anne; Beyer, Gerald; De Gendt, Stefan (2013) -
Focus spot reduction by brush scrubber cleaning
Pacco, Antoine; Kesters, Els; Simms, Ihsan; Nafus, Kathleen; Vandereyken, Jelle; Yonekawa, Hiroki (2014) -
Partial wetting of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish
Vereecke, Guy; Xu, XiuMei; Tsai, W.K.; Yang, Hui; Armini, Silvia; Delande, Tinne; Doumen, Geert; Kentie, F.; Shi, Xiaoping; Simms, Ihsan; Nafus, Kathleen; Holsteyns, Frank; Struyf, Herbert; De Gendt, Stefan (2014) -
UV-induced modification of fluorocarbon polymer for improvement of wet removal
Le, Quoc Toan; Simms, Ihsan; Yue, Henry; Brown, Ian; Kesters, Els; Vereecke, Guy; Struyf, Herbert; De Gendt, Stefan (2014) -
UV-induced modification of fluorocarbon polymer for improvement of wet removal
Le, Quoc Toan; Simms, Ihsan; Yue, Henry; Brown, Ian; Kesters, Els; Struyf, Herbert; De Gendt, Stefan (2012) -
Wet removal of post-etch residues by a combination of UV irradiation and a SC1 process
Kesters, Els; Le, Quoc Toan; Simms, Ihsan; Nafus, Kathleen; Struyf, Herbert; De Gendt, Stefan (2013) -
Wetting behavior of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish
Vereecke, Guy; Xu, XiuMei; Tsai, Wei-Kang; Yang, Hui; Armini, Silvia; Delande, Tinne; Doumen, Geert; Kentie, Frank; Shi, Xiaoping; Simms, Ihsan; Nafus, Kathleen; Holsteyns, Frank; Struyf, Herbert; De Gendt, Stefan (2013)