Browsing by author "Song, H."

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Exploration of etch step interactions in the dual patterning process for process modeling

Melvin, Lawrence; Ward, Brian; Song, H.; Rhie, S.U.; Lucas, K.D.; Wiaux, Vincent; Verhaegen, Staf; Maenhoudt, Mireille (2008)
Plasma immersion ion implantation for shallow junctions in silicon

Pinter, Istvan; Abdulhadi, A.; Makaro, Z.; Khanh, N.; Adam, M.; Barsony, I.; Sivoththaman, Sivanarayanamoorthy; Poortmans, Jef; Song, H.; Adriaenssens, G. (1998)