Browsing by author "Vanoppen, Peter"
Now showing items 1-6 of 6
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3D features measurement using YieldStar, an angle resolved polarized scatterometer
Charley, Anne-Laure; Leray, Philippe; D'have, Koen; Cheng, Shaunee; Hinnen, Paul; Li, Fahong; Vanoppen, Peter; Dusa, Mircea (2011) -
3D features measurement using Yieldstar, an angle resolved polarized scatterometer
Charley, Anne-Laure; Leray, Philippe; D'have, Koen; Cheng, Shaunee; Hinnen, P.; Li, Fahong; Vanoppen, Peter; Dusa, Mircea (2011) -
A single metrology tool solution for complete exposure tool setup
Laidler, David; D'have, Koen; Charley, Anne-Laure; Leray, Philippe; Cheng, Shaunee; Dusa, Mircea; Vanoppen, Peter; Hinnen, Paul (2010) -
Achieving optimum diffraction based overlay performance
Leray, Philippe; Laidler, David; Cheng, Shaunee; Coogans, Martyn; Fuchs, Andreas; Ponomarenko, Mariya; van der Schaar, Maurits; Vanoppen, Peter (2010) -
Focus and dose de-convolution technique for improved CD-control of immersion clusters
Charley, Anne-Laure; D'have, Koen; Leray, Philippe; Laidler, David; Cheng, Shaunee; Dusa, Mircea; Hinnen, Paul; Vanoppen, Peter (2010) -
KrF lithography for 130nm
Finders, Jo; van Schoot, J.; Vanoppen, Peter; Dusa, M.; Socha, B.; Vandenberghe, Geert; Ronse, Kurt (2000)