Browsing by author "Chen, Bingan"
Now showing items 1-4 of 4
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Carbon nanotube growth for high aspect ratio interconnect applications
Xie, Rongsie; Zhang, Can; Chen, Bingan; Zhong, Guofang; Robertson, john; van der Veen, Marleen (2012) -
Carbon nanotube growth for through-silicon via applications
Xie, Rongsie; Zhang, Can; van der Veen, Marleen; Arstila, Kai; Hantschel, Thomas; Chen, Bingan; Zhong, Guofang; Robertson, John (2013) -
Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication
Zhang, Can; Feng, Yan; Bayer, Bernhard; Blume, Raoul; van der Veen, Marleen; Xie, Rongsi; Zhong, Guofang; Chen, Bingan; Knop-Gericke, Axel; Schlögl, Robert; Capraro, Bernard; Hofmann, Stephan; Robertson, john (2012) -
Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
Xie, Rongsi; Zhang, Can; Chen, Bingan; van der Veen, Marleen; Zhong, Guofang; Robertson, john (2014)