Browsing by author "Xie, Rongsi"
Now showing items 1-3 of 3
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Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication
Zhang, Can; Feng, Yan; Bayer, Bernhard; Blume, Raoul; van der Veen, Marleen; Xie, Rongsi; Zhong, Guofang; Chen, Bingan; Knop-Gericke, Axel; Schlögl, Robert; Capraro, Bernard; Hofmann, Stephan; Robertson, john (2012) -
Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
Xie, Rongsi; Zhang, Can; Chen, Bingan; van der Veen, Marleen; Zhong, Guofang; Robertson, john (2014) -
Vertically-aligned carbon nanotube growth in high aspect ratio through-silicon vias
Xie, Rongsi; Feng, Yan; Can, Zhang; Guofang, Zhang; van der Veen, Marleen; John, Robertson (2011-09)