Browsing by author "Zhang, Fenghong"
Now showing items 1-6 of 6
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An optical fibre sensor for particle concentration measurement in water systems based on inter-fibre light coupling between polymer optical fibres
Zhang, Fenghong; Lewis, E.; Scully, P. J. (2000) -
CD control using SiON BARL processing for sub 0.25µm lithography
Zhang, Fenghong; Op de Beeck, Maaike; Ronse, Kurt; Gangala, Hareen K; Gopalan, P.; Conley, P.; Dusa, M.; Bendik, Joe (1998) -
CD control using SiON BARL processing for sub-0.25μm lithography
Zhang, Fenghong; Op de Beeck, Maaike; Schaekers, Marc; Ronse, Kurt; Conley, W.; Gopalan, P.; Gangala, Hareen K; Dusa, M.; Bendik, Joe (1999) -
How to use DUV BARCs on topography
Op de Beeck, Maaike; Vandenberghe, Geert; Jaenen, Patrick; Zhang, Fenghong; Delvaux, Christie; Van Puyenbroeck, Ilse; Ronse, Kurt (1998) -
Optimisation of bottom-ARC processes with respect to CD control
Op de Beeck, Maaike; Vandenberghe, Geert; Jaenen, Patrick; Zhang, Fenghong; Delvaux, Christie; Van Puyenbroeck, Ilse; Ronse, Kurt; Lamb, J. E.; van der Hilst, J. B. C. (1998) -
SiON ARC: Material characterization and implication in lithographic process
Zhang, Fenghong; Pollentier, Ivan; Eliat, Astrid; Delvaux, Christie; Ronse, Kurt (2000)