Publication:
CD control using SiON BARL processing for sub 0.25µm lithography
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1967 since deposited on 2021-10-01
2last month
Acq. date: 2025-12-10
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Metrics
Views
1967 since deposited on 2021-10-01
2last month
Acq. date: 2025-12-10
Citations