Browsing by author "Borden, P."
Now showing items 1-5 of 5
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Carrier illumination as a tool to probe implant dose and electrical activation
Vandervorst, Wilfried; Clarysse, Trudo; Brijs, Bert; Loo, Roger; Peytier, Ivan; Pawlak, Bartek; Budiarto, E.; Borden, P. (2003) -
Carrier illumination for characterization of ultrashallow doping profiles
Clarysse, Trudo; Lindsay, Richard; Vandervorst, Wilfried; Budiarto, E.; Borden, P. (2004-02) -
Carrier illumination for monitoring of CMOS ultra-shallow junctions
Clarysse, Trudo; Vandervorst, Wilfried; Lindsay, Richard; Borden, P.; Budiarto, E. (2002) -
Junction and profile analysis using carrier illumination
Clarysse, Trudo; Vandervorst, Wilfried; Lindsay, Richard; Borden, P.; Budiarto, E.; Madsen, J.; Nijmeijer, R. (2002) -
Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS
Borden, P.; Bechtler, L.; Klemme, B.; Nijmeijer, R.; Judge, E.; Diebold, A.; Bennett, J.; Vandervorst, Wilfried; Clarysse, Trudo; Caymax, Matty; Peytier, Ivan (2001)