Browsing by author "Blauw, Michiel"
Now showing items 1-7 of 7
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Atomic layer deposition of metal oxide thin films for sensing applications
Blauw, Michiel; Dam, Van Anh; Crego Calama, Mercedes; Brongersma, Sywert (2012) -
Gas sensing with atomic layer deposited dielectric thin film
Dam, Van Anh; Blauw, Michiel; Rovers, Madelon; Brongersma, Sywert; van Schaijk, Rob (2013) -
Oxygen sensing with ZnO thin films
Blauw, Michiel; Dam, Van Anh; Crego Calama, Mercedes; Brongersma, Sywert (2011) -
Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
Armini, Silvia; Loyo Prado, Jana; Krishtab, Mikhail; Swerts, Johan; Verdonck, Patrick; Meersschaut, Johan; Conard, Thierry; Blauw, Michiel; Struyf, Herbert; Baklanov, Mikhaïl (2014) -
Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
Armini, Silvia; Loyo Prado, Jana; Swerts, Johan; Sun, Yiting; Krishtab, Mikhail; Meersschaut, Johan; Blauw, Michiel; Baklanov, Mikhaïl; Verdonck, Patrick (2012) -
Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
Sun, Yiting; Levrau, Elisabeth; Blauw, Michiel; Meersschaut, Johan; Verdonck, Patrick; Struyf, Herbert; Detavernier, Chrostophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2013) -
Sensitivity enhancement of metal oxide thin film transistor with back gate biasing
Dam, Van Anh; Blauw, Michiel; Brongersma, Sywert; Crego Calama, Mercedes (2011)