Browsing by author "Strauss, Michael"
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Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices
Johanesen, Hayley; Strauss, Michael; Kenslea, Anne; Hakala, Chris; Kwakman, Laurens; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy (2019) -
Scatterometry and AFM measurement combination for area selective deposition process characterization
Saib, Mohamed; Moussa, Alain; Charley, Anne-Laure; Leray, Philippe; Hung, Joey; Koret, Roy; Turovets, Igor; Ger, Avron; Deng, Shaoren; Illiberi, Andrea; Maes, Jan Willem; Woodworth, Gabriel; Strauss, Michael (2019) -
Statistical significance of STEM based metrology on advanced 3D transistor structures
Kwakman, Laurens; Kenslea, Anne; Johanesen, Hayley; Strauss, Michael; Boullart, Werner; Mertens, Hans; Siew, Yong Kong; Barla, Kathy (2019)