Browsing by author "Jouve, Amandine"

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Characterization of extreme ultraviolet resists with interference lithography

Solak, Harun H.; Ekinci, Yasin; Gronheid, Roel; Jouve, Amandine (2005)
Microstepper vs. interference EUV lithography: effects on resist profiles

Gronheid, Roel; Van Roey, Frieda; Goethals, Mieke; Solak, Harun H.; Ekinci, Yasin; van Ingen Schenau, Koen; Vannuffel, Cyril; Jouve, Amandine (2005)