Browsing by author "Proshina, Olga"
Now showing items 1-3 of 3
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1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures
Proshina, Olga; Rakhimova, Tatyana; Baklanov, Mikhaïl (2013) -
Comparison between Vacuum Ultra-Violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching
Zotovich, Alexey; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, Olga; Lopaev, Dimitri; Rakhimova, Tatyana; Baklanov, Mikhaïl (2016) -
Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures
Rakhimova, Tatyana; Braginsky, OLEG; Klopovskiy, Konstantin; Kovalev, Alexander; Lopaev, Dmitry; Proshina, Olga; Rakhimov, Alexander; Shamiryan, Denis; Vasilieva, Anna; Voloshin, Dmitry (2009)