Browsing by author "Last, Thorsten"

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Experimental verification of phase induced mask 3D effects in EUV imaging

Wittebrood, Friso; de Winter, Laurens; Last, Thorsten; Van Look, Lieve; Philipsen, Vicky; Finders, Jo; Schiffelers, Guido; Hendrickx, Eric (2015)
Mask 3D effect mitigation by source optimization and assist feature placement

Van Look, Lieve; Mochi, Iacopo; Philipsen, Vicky; Gallagher, Emily; Hendrickx, Eric; McIntyre, Greg; Wittebrood, Friso; Lyakhova, Kateryna; de Winter, Laurens; Last, Thorsten; Fliervoet, Timon; Schiffelers, Guido; Finders, Jo; Van Adrichem, Paul; Lyons, Adam; Laenens, Bart; Liddle, Jack; Neumann, Jens Timo (2016)