Browsing by author "Pistol, L."

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Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths

Prager, Lutz; Naumov, Sergei; Pistol, L.; Wennrich, L.; Buchmeister, M. R.; Marsik, Premysl; Verdonck, Patrick; Baklanov, Mikhaïl (2008)
Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Prager, L.; Marsik, Premysl; Wennrich, L.; Baklanov, Mikhaïl; Naumov, S.; Pistol, L.; Schneider, D.; Gerlach, J.W.; Verdonck, Patrick; Buchmeiser, M.R. (2008)