Authors

Prager, L.; Marsik, Premysl; Wennrich, L.; Baklanov, Mikhaïl; Naumov, S.; Pistol, L.; Schneider, D.; Gerlach, J.W.; Verdonck, Patrick; Buchmeiser, M.R.

ISSN

0167-9317

Issue

10

Journal

Microelectronic Engineering

Volume

85

Title

Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Publication type

Journal article

Embargo date

9999-12-31