Browsing by author "Elers, K."
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Properties of TiN thin films deposited by ALCVD as barriers for Cu metallization
Satta, Alessandra; Beyer, Gerald; Maex, Karen; Elers, K.; Haukka, S.; Vantomme, Andre (2000) -
Properties of TiN thin films deposited by ALCVD as barriers for Cu metallization
Satta, Alessandra; Beyer, Gerald; Maex, Karen; Elers, K.; Haukka, S.; Vantomme, Andre (2001)