Authors

Satta, Alessandra; Beyer, Gerald; Maex, Karen; Elers, K.; Haukka, S.; Vantomme, Andre

Conference

MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics

Title

Properties of TiN thin films deposited by ALCVD as barriers for Cu metallization

Publication type

Oral presentation