Browsing by author "Jiang, J."
Now showing items 1-3 of 3
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Creative metrology development for EUVL: Flare and out-of-band qualification
Lorusso, Gian; Hendrickx, Eric; Davydova, N.; Peng, Y.; Eurlings, M.; Feenstra, K.; Jiang, J. (2011) -
Model calibration and validation for pre-production EUVL
Lorusso, Gian; Van de Kerkhove, Jeroen; De Bisschop, Peter; Hendrickx, Eric; Jiang, J.; Rio, David; Liu, W.; Liu, H. (2012) -
Separable models for computational lithography
Liu, Hua-Yu; Zhao, Q.; Chen, J.F.; Jiang, J.; Socha, B.; Van Setten, E.; Engelen, A.; Meessen, J.; Crouse, M.M.; Feng, M.; Shao, W.; Cao, H.; Cao, Y.; Van Look, Lieve; Bekaert, Joost; Vandenberghe, Geert; Finders, Jo (2008)