Browsing by author "Escorcia, O."

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Improved low-k dielectric properties using He/H2 plasma for resist removal

Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, K.; Kaneko, S.; Tsuji, N.; Luo, S.; Escorcia, O.; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2008)
Role of dielectric and barrier integrity in reliability of sub-100nm copper low-k interconnect

Tokei, Zsolt; Van Aelst, Joke; Waldfried, C.; Escorcia, O.; Roussel, Philippe; Richard, Olivier; Travaly, Youssef; Beyer, Gerald; Maex, Karen (2005)