Authors

Tokei, Zsolt; Van Aelst, Joke; Waldfried, C.; Escorcia, O.; Roussel, Philippe; Richard, Olivier; Travaly, Youssef; Beyer, Gerald; Maex, Karen

Conference

43rd Annual IEEE International Reliability Physics Symposium Proceedings

Title

Role of dielectric and barrier integrity in reliability of sub-100nm copper low-k interconnect

Publication type

Proceedings paper