Browsing by author "Yafarov, R."
Now showing items 1-3 of 3
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Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etching
Yanovich, S.; Baklanov, Mikhaïl; Orlov, S.; Gushchin, O.; Zaitsev, N.; Ignatov, P.; Yafarov, R. (2012) -
Auto-emission device with nano-diamond cathode
Gutschin, O.; Zaitsev, N.; Ignatov, P.; Yanovich, S.; Orlov, S.; Kartashiov, D.; Yafarov, R.; Baklanov, Mikhaïl (2010) -
Nanostructured silicon surface morphology formation under highly ionized microwave plasma conditions
Baklanov, Mikhaïl; Guschin, O.; Ignatov, P.; Yafarov, R.; Yanovich, S. (2011)