Browsing by author "Smith, A.J."
Now showing items 1-4 of 4
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Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Cristiano, F.; Claverie, A.; Duffy, Ray; Pawlak, Bartek; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C. (2004) -
Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth
Pawlak, Bartek; Vandervorst, Wilfried; Smith, A.J.; Cowern, Nick E.B.; Colombeau, B.; Pagès, Xavier (2005) -
Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Pawlak, Bartek; Surdeanu, Radu; Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Lindsay, Richard; Vandervorst, Wilfried; Brijs, Bert; Richard, Olivier; Cristiano, F. (2004) -
Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Pawlak, Bartek; Duffy, Ray; Janssens, Tom; Vandervorst, Wilfried; Maex, Karen; Smith, A.J.; Cowern, N.E.B; Dao, T.; Tamminga, Y. (2005)