Browsing by author "Naumov, Sergej"
Now showing items 1-4 of 4
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Conversion of a patterned organic resist into a high performance inoriganic hard mask for high resolution pattern transfer
de Marneffe, Jean-Francois; Chan, BT; Spieser, Martin; Vereecke, Guy; Naumov, Sergej; Vanhaeren, Danielle; Knoll, Armin; Wolf, Heiko (2018) -
Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
Redzheb, Murad; Prager, Lutz; Naumov, Sergej; Armini, Silvia; Voort, Pascal Van Der; Krishtab, Mikhail; Baklanov, Mikhaïl (2016) -
Improved plasma resistance for porous low-k dielectrics by pore stuffing approach
Zhang, Liping; de Marneffe, Jean-Francois; Heyne, Markus; Naumov, Sergej; Sun, Yiting; Zotovich, Alexey; El Otell, Ziad; Vaida, Selim; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Mechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere
Le, Quoc Toan; Naumov, Sergej; Conard, Thierry; Franquet, Alexis; Müller, Matthias; Beckhoff, Burkhard; Adelmann, Christoph; Struyf, Herbert; De Gendt, Stefan; Baklanov, Mikhaïl (2013)