Browsing by author "Waldfried, C."

Now showing items 1-2 of 2

Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions

Kesters, Els; Le, Quoc Toan; Boullart, Werner; Han, Q.; Berry, I.; Waldfried, C.; Mertens, Paul; Heyns, Marc (2005)
Role of dielectric and barrier integrity in reliability of sub-100nm copper low-k interconnect

Tokei, Zsolt; Van Aelst, Joke; Waldfried, C.; Escorcia, O.; Roussel, Philippe; Richard, Olivier; Travaly, Youssef; Beyer, Gerald; Maex, Karen (2005)