Browsing by author "Petersen, Dirch Hjorth"
Now showing items 1-5 of 5
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Apparent size effects on dopant activation in nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Favia, Paola; Wouters, Lennaert; Petersen, Dirch Hjorth; Hansen, Ole; Henrichsen, Henrik Hartmann; Nielsen, Peter Former; Shiv, Lior; Vandervorst, Wilfried (2021) -
Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Oesterberg, Frederik Westergaard; Witthoeft, Maria-Louise; Dutta, Shibesh; Meersschaut, Johan; Adelmann, Christoph; Nielsen, Peter Former; Hansen, Ole; Petersen, Dirch Hjorth (2018) -
Systematic study of shallow junction formation on Germanium substrates
Hellings, Geert; Rosseel, Erik; Clarysse, Trudo; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmer; Simoen, Eddy; Eneman, Geert; De Jaeger, Brice; Hoffmann, Thomas Y.; De Meyer, Kristin; Vandervorst, Wilfried (2010) -
Systematic study of shallow junction formation on germanium substrates
Hellings, Geert; Rosseel, Erik; Clarysse, Trudo; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmet; Simoen, Eddy; Eneman, Geert; De Jaeger, Brice; Hoffmann, Thomas Y.; De Meyer, Kristin; Vandervorst, Wilfried (2011) -
Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing
Hellings, Geert; Rosseel, Erik; Simoen, Eddy; Radisic, Dunja; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmer; Zschaetzsch, Gerd; Nazir, Aftab; Clarysse, Trudo; Vandervorst, Wilfried; Hoffmann, Thomas Y.; De Meyer, Kristin (2011)