Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

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Authors

Hellings, Geert; Rosseel, Erik; Simoen, Eddy; Radisic, Dunja; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmer; Zschaetzsch, Gerd; Nazir, Aftab; Clarysse, Trudo; Vandervorst, Wilfried; Hoffmann, Thomas Y.; De Meyer, Kristin

ISSN

1099-0062

Issue

1

Journal

Electrochemical and Solid-State Letters

Volume

14

Title

Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

Publication type

Journal article

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