Publication:

Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

Date

2011

Journal article

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Author(s)

Hellings, Geert

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;

;

;

Petersen, Dirch Hjorth

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;

Nielsen, Peter Folmer

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Zschaetzsch, Gerd

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;

Clarysse, Trudo

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Vandervorst, Wilfried

;

Hoffmann, Thomas Y.

;

De Meyer, Kristin

Journal

Electrochemical and Solid-State Letters

Metrics

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Acq. date: 2025-12-10