Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

Simple item page Full metadata Statistics

Author(s)

Hellings, Geert

;

;

;

;

Petersen, Dirch Hjorth

;

;

Nielsen, Peter Folmer

;

Zschaetzsch, Gerd

;

;

Clarysse, Trudo

;

Vandervorst, Wilfried

;

Hoffmann, Thomas Y.

;

De Meyer, Kristin

Journal

Electrochemical and Solid-State Letters

Metrics

2013 since deposited on 2021-10-19

Acq. date: 2025-10-23