Publication:

Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

Date

2011
Journal article
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dc.contributor.authorHellings, Geert
dc.contributor.authorRosseel, Erik
dc.contributor.authorSimoen, Eddy
dc.contributor.authorRadisic, Dunja
dc.contributor.authorPetersen, Dirch Hjorth
dc.contributor.authorHansen, Ole
dc.contributor.authorNielsen, Peter Folmer
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorNazir, Aftab
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-19T14:14:38Z
dc.date.available2021-10-19T14:14:38Z
dc.date.issued2011
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19060
dc.source.beginpageH39
dc.source.endpageH41
dc.source.issue1
dc.source.journalElectrochemical and Solid-State Letters
dc.source.volume14
dc.title

Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

dc.typeJournal article
dspace.entity.typePublication
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