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Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
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Authors
Oesterberg, Frederik Westergaard
;
Witthoeft, Maria-Louise
;
Dutta, Shibesh
;
Meersschaut, Johan
;
Adelmann, Christoph
;
Nielsen, Peter Former
;
Hansen, Ole
;
Petersen, Dirch Hjorth
ISSN
2158-3226
Issue
5
Journal
AIP Advances
Volume
8
Title
Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Publication type
Journal article
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