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Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Publication:
Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Oesterberg, Frederik Westergaard
;
Witthoeft, Maria-Louise
;
Dutta, Shibesh
;
Meersschaut, Johan
;
Adelmann, Christoph
;
Nielsen, Peter Former
;
Hansen, Ole
;
Petersen, Dirch Hjorth
Journal
AIP Advances
Abstract
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2099
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations
Metrics
Views
2099
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations