Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

dc.contributor.author	Oesterberg, Frederik Westergaard
dc.contributor.author	Witthoeft, Maria-Louise
dc.contributor.author	Dutta, Shibesh
dc.contributor.author	Meersschaut, Johan
dc.contributor.author	Adelmann, Christoph
dc.contributor.author	Nielsen, Peter Former
dc.contributor.author	Hansen, Ole
dc.contributor.author	Petersen, Dirch Hjorth
dc.contributor.imecauthor	Meersschaut, Johan
dc.contributor.imecauthor	Adelmann, Christoph
dc.contributor.orcidimec	Meersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimec	Adelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned	2021-10-26T00:20:30Z
dc.date.available	2021-10-26T00:20:30Z
dc.date.issued	2018
dc.identifier.issn	2158-3226
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/31439
dc.identifier.url	https://doi.org/10.1063/1.5010399
dc.source.beginpage	055206-1
dc.source.endpage	055206-7
dc.source.issue	5
dc.source.journal	AIP Advances
dc.source.volume	8
dc.title	Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
dc.type	Journal article
dspace.entity.type	Publication
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