Browsing by author "Ling, Fangzhou"
Now showing items 1-8 of 8
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An investigation of stiction in Poly-SiGe micromirror
Ling, Fangzhou; De Coster, Jeroen; Beernaert, Roel; Witvrouw, Ann; Celis, Jean-Pierre; De Wolf, Ingrid (2011) -
Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
De Coster, Jeroen; Ling, Fangzhou; Witvrouw, Ann; De Wolf, Ingrid (2013-06) -
Investigation of in-use stiction and adhesion in poly-SiGe MEMS
Ling, Fangzhou (2013-03) -
Investigation of temporary stiction in poly-SiGe micromirror arrays
Ling, Fangzhou; De Coster, Jeroen; Lin, Wan-Yu; Witvrouw, Ann; Celis, Jean-Pierre; De Wolf, Ingrid (2011) -
Investigation of temporary stiction in poly-SiGe micromirror arrays
Ling, Fangzhou; De Coster, Jeroen; Lin, Wan-Yu; Witvrouw, Ann; Celis, Jean-Pierre; De Wolf, Ingrid (2012) -
Processing assessment and adhesion evaluation of copper through-silicon vias (TSVs) for three-dimensional stacked-integrated circuit (3D-SIC) architectures
Yang, Yu; Labie, Riet; Ling, Fangzhou; Zhao, Chao; Radisic, Alex; Van Olmen, Jan; Travaly, Youssef; Verlinden, Bert; De Wolf, Ingrid (2010) -
Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film
Ling, Fangzhou; De Coster, Jeroen; Beernaert, Roel; Lin, Wan-Yu; Celis, Jean-Pierre; De Wolf, Ingrid (2010) -
Study of glass frit induced stiction using a micromirror array
Ling, Fangzhou; De Coster, Jeroen; Witvrouw, Ann; Celis, J. P.; De Wolf, Ingrid (2012)