Publication:
Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1892 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-09
Citations
Statistics
Views
1892 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-09
Citations