Publication:
Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film
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1886 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
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Metrics
Views
1886 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
Citations