Browsing by author "Catana, Gabriela"
Now showing items 1-6 of 6
-
Contamination control for the 32nm node
Bearda, Twan; Vos, Rita; Mertens, Paul; Catana, Gabriela; Huyghebaert, Cedric (2008) -
From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis
Catana, Gabriela; De Backker, Kris (2003-10) -
Implementation of a system for metal contamination control based on classification criteria
Bearda, Twan; Catana, Gabriela; Hellin, David; Vos, Rita (2008) -
Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study
Deweerd, Wim; Schram, Tom; Catana, Gabriela; Shamiryan, Denis; Garaud, Sylvain; Hellin, David; De Gendt, Stefan; Heyns, Marc; Wickramanayaka, S.; Kawashima, T.; Yamada, N.; Vertommen, Johan; Lander, Rob (2004) -
Wafer backside cleaning strategies for high-k/metal gate processing
Vos, Rita; Kesters, Els; Garaud, Sylvain; De Waele, Rita; Kenis, Karine; Lux, Marcel; Kraus, Harald; Snow, Jim; Shamiryan, Denis; Catana, Gabriela; Deweerd, Wim; Schram, Tom; De Gendt, Stefan; Mertens, Paul (2005) -
Wafer backside cleaning strategies for high-k/metal gate processing
Vos, Rita; Kesters, Els; Garaud, Sylvain; De Waele, Rita; Kenis, Karine; Lux, Marcel; Kraus, Harald; Snow, Jim; Shamiryan, Denis; Catana, Gabriela; Deweerd, Wim; Schram, Tom; De Gendt, Stefan; Mertens, Paul (2004)