Publication:

Wafer backside cleaning strategies for high-k/metal gate processing

Date

2005

Proceedings Paper

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Author(s)

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Garaud, Sylvain

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Shamiryan, Denis

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Catana, Gabriela

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De Gendt, Stefan

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Metrics

1993 since deposited on 2021-10-16

Acq. date: 2026-01-07