Browsing by author "Petersson, C. S."
Now showing items 1-3 of 3
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Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers
Zhang, S. L.; Palmans, Roger; Petersson, C. S.; Maex, Karen (1995) -
Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
Zhang, S. L.; Palmans, Roger; Keinonen, J.; Petersson, C. S.; Maex, Karen (1995) -
Strain characterization of CoSi2/n-Si0.9/Ge0.1/p-Si heterostructures
Nur, O.; Willander, M.; Radamson, H. H.; Sardela, M. R.; Hansson, G. V.; Petersson, C. S.; Maex, Karen (1994)