Browsing by author "Kondoh, E."
Now showing items 1-3 of 3
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Metal thin films etching in supercritical CO2 fluid
Nakamura, Y.; Watanabe, M.; Kondoh, E.; Baklanov, Mikhaïl (2015) -
Supercritical CO2 etching of metal thin films for magnetoresistive memory processing
Rasadujjaman, M; Nakamura, Y.; Watanabe, M.; Kondoh, E.; Baklanov, Mikhaïl (2015) -
Thermal etching of metal thin films using supercritical fluid
Watanabe, M.; Nakamura, Y.; Kondoh, E.; Baklanov, Mikhaïl (2015)