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Conference contributions
Metal thin films etching in supercritical CO2 fluid
Publication:
Metal thin films etching in supercritical CO2 fluid
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Date
2015
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nakamura, Y.
;
Watanabe, M.
;
Kondoh, E.
;
Baklanov, Mikhaïl
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Abstract
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1828
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Acq. date: 2025-12-09
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Views
1828
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-09
Citations