Publication:
Metal thin films etching in supercritical CO2 fluid
Date
| dc.contributor.author | Nakamura, Y. | |
| dc.contributor.author | Watanabe, M. | |
| dc.contributor.author | Kondoh, E. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-22T21:21:49Z | |
| dc.date.available | 2021-10-22T21:21:49Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25688 | |
| dc.source.beginpage | 11a-A29-2 | |
| dc.source.conference | 62nd Japan Society of Applied Physics Spring Meeting | |
| dc.source.conferencedate | 11/03/2015 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.title | Metal thin films etching in supercritical CO2 fluid | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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