Supercritical CO2 etching of metal thin films for magnetoresistive memory processing

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Authors
Rasadujjaman, M; Nakamura, Y.; Watanabe, M.; Kondoh, E.; Baklanov, Mikhaïl
Conference
41st Micro and Nanoengineering Conference - MNE
Title
Supercritical CO2 etching of metal thin films for magnetoresistive memory processing
Publication type
Meeting abstract
Embargo date
9999-12-31
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