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Supercritical CO2 etching of metal thin films for magnetoresistive memory processing
Publication:
Supercritical CO2 etching of metal thin films for magnetoresistive memory processing
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rasadujjaman, M
;
Nakamura, Y.
;
Watanabe, M.
;
Kondoh, E.
;
Baklanov, Mikhaïl
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1887
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Acq. date: 2025-12-10
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Views
1887
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-10
Citations