Browsing by author "Bauer, T."
Now showing items 1-5 of 5
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A controlled deposition of organic contamination and the removal with ozone based cleaning
Claes, Martine; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Lagrange, Sébastien; Mertens, Paul; Heyns, Marc (2001) -
Controlled deposition of organic contamination and removal with ozone-based cleaning
Claes, M.; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Mertens, Paul; Heyns, Marc (2001) -
Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
Vereecke, Guy; Vos, Rita; Holsteyns, Frank; Schmidt, M.O.; Baeyens, Martien; Gomme, Steven; Snow, Jim; Coenen, V.; Mertens, Paul; Bauer, T.; Heyns, Marc (2003) -
Investigating the role of gas cavitation in megasonic nanoparticle removal
Vereecke, Guy; Parton, Els; Holsteyns, Frank; Xu, K; Vos, Rita; Mertens, Paul; Schmidt, M.O.; Bauer, T. (2004) -
Surface characterization after different wet chemical cleans
Claes, Martine; Röhr, Erika; Conard, Thierry; De Smedt, Frank; De Gendt, Stefan; Storm, Wolfgang; Bauer, T.; Mertens, Paul; Heyns, Marc (2001)