Controlled deposition of organic contamination and removal with ozone-based cleaning

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Authors

Claes, M.; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Mertens, Paul; Heyns, Marc

Issue

3

Journal

Journal of the Electrochemical Society

Volume

148

Title

Controlled deposition of organic contamination and removal with ozone-based cleaning

Publication type

Journal article

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