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Controlled deposition of organic contamination and removal with ozone-based cleaning
Publication:
Controlled deposition of organic contamination and removal with ozone-based cleaning
Date
2001
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, M.
;
De Gendt, Stefan
;
Kenens, Conny
;
Conard, Thierry
;
Bender, Hugo
;
Storm, Wolfgang
;
Bauer, T.
;
Mertens, Paul
;
Heyns, Marc
Journal
Journal of the Electrochemical Society
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2083
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2083
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations