Publication:

Controlled deposition of organic contamination and removal with ozone-based cleaning

Date

2001
Journal article
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dc.contributor.authorClaes, M.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKenens, Conny
dc.contributor.authorConard, Thierry
dc.contributor.authorBender, Hugo
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorBauer, T.
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T16:41:51Z
dc.date.available2021-10-14T16:41:51Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5143
dc.source.beginpageG118
dc.source.endpage125
dc.source.issue3
dc.source.journalJournal of the Electrochemical Society
dc.source.volume148
dc.title

Controlled deposition of organic contamination and removal with ozone-based cleaning

dc.typeJournal article
dspace.entity.typePublication
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