Authors

Claes, Martine; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Lagrange, Sébastien; Mertens, Paul; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS

Title

A controlled deposition of organic contamination and the removal with ozone based cleaning

Publication type

Proceedings paper

Embargo date

9999-12-31